[2010] Seok-Jun Won, "High-Quality Low-Temperature Silicon Oxide …
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Seok-Jun Won, Sungin Suh, Myung Soo Huh, and Hyeong Joon Kim
"High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical"
IEEE Electron Device Letters, Vol.31, No.8, pp.857-859 (2010)
"High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical"
IEEE Electron Device Letters, Vol.31, No.8, pp.857-859 (2010)
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