[2010] Seok-Jun Won, "High-Quality Low-Temperature Silicon Oxide …
페이지 정보
작성자 관리자 작성일16-05-09 12:37 조회1,619회 댓글0건첨부파일
-
204.pdf (131.8K) 18회 다운로드 DATE : 2016-05-09 12:37:48
관련링크
본문
Seok-Jun Won, Sungin Suh, Myung Soo Huh, and Hyeong Joon Kim
"High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical"
IEEE Electron Device Letters, Vol.31, No.8, pp.857-859 (2010)
"High-Quality Low-Temperature Silicon Oxide by Plasma-Enhanced Atomic Layer Deposition Using a Metal–Organic Silicon Precursor and Oxygen Radical"
IEEE Electron Device Letters, Vol.31, No.8, pp.857-859 (2010)
댓글목록
등록된 댓글이 없습니다.